| Name | Description | Type | Additional information |
|---|---|---|---|
| Model_Code | string |
None. |
|
| Chamber_Name | string |
None. |
|
| Current_Voltage | string |
None. |
|
| Current_Temp | string |
None. |
|
| Start_Date_Time | date |
None. |
|
| End_Date_Time | date |
None. |
|
| Running_Time | string |
None. |
|
| Status | string |
None. |
|
| Flag | string |
None. |